Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry
Endres J., Kumar N., Petrik P., Henn M.-A., Heidenreich S., Pereira S. F., Urbach H. P., Bodermann B.Scatterometry, CD, pitch, inverse diffraction problem
| Document type | Proceedings |
| Journal title / Source | Proc SPIE |
| Volume | 9132 |
| Publication date | 2015 |
| Conference name | SPIE Optical Micro- and Nanometrology V |
| Conference date | April 14, 2014 |
| Conference place | Brussels, Belgium |
| DOI | 10.1117/12.2052819 |
| Language | English |