Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS
Milles L.F., Stahl S.W., Sulzbach T., Engl W., Gao S., Brand U., Nesterov V., Li Z.cantilever stiffness calibration, active reference spring, micro-electro-mechanical system
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 28 |
| Issue | 3 |
| Page numbers / Article number | 034010 |
| Publisher's name | IOP Publishing |
| Publication date | 2017-1-23 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/28/3/034010 |
| Web URL | http://iopscience.iop.org/article/10.1088/1361-6501/28/3/034010/pdf |
| Language | English |