Model-based interfacing of large-scale metrology instruments
Montavon B., Peterek M., Schmitt R.H.Large-Scale Metrology, Internet of Production, Cyper Physical Production Systems
Document type | Proceedings |
Journal title / Source | Multimodal Sensing: Technologies and Applications |
Publisher's name | SPIE |
Publication date | 2019-6-21 |
Conference name | SPIE Optical Metrology |
Conference date | 24-06-2019 to 28-06-2019 |
Conference place | Munich |
DOI | 10.1117/12.2527461 |
Web URL | http://arxiv.org/abs/2001.05897 |
Language | English |