Characterization and Monte Carlo evaluation of positioning uncertainty of an MAFM.
Nysten J.metrologia mittaus epävarmuus pinnat metrology measurement uncertainty surfaces
| Document type | Thesis |
| Journal title / Source | |
| University name | University of Jyväskylä |
| Publication date | 2019-2-19 |
| Web URL | http://urn.fi/URN:NBN:fi:jyu-201902191567 |
| Language | English |
| Persistent Identifier | https://jyx.jyu.fi/handle/123456789/62847 |