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Observing and measuring strain in nanostructures and devices with transmission electron microscopy

Hytch MH, Minor AMM
Keywords:

Nanostructure, silicon, stress/strain relationship, transmission electron microscopy

Document type Article
Journal title / Source MRS Bulletin
Peer-reviewed article 1
Volume 39
Issue 2
Page numbers / Article number 138-146
Publisher's name Cambridge University Press
Publisher's address (city only) Cambridge
Publication date 2014-2-12
ISSN 0883-7694
DOI 10.1557/mrs.2014.4
Web URL https://www.cambridge.org/core/journals/mrs-bulletin/article/observing-and-measuring-strain-in-nanostructures-and-devices-with-transmission-electron-microscopy/296C465E63EC9AEB189EFFE7AA4C1116
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2012 Metrology for Industry (II)