Ongoing trends in precision metrology,particularly in nanopositioning and nanomeasuring technology
Manske E., Fuessl R., Mastylo R., Vorbringer-Dorozhovets N., Birli O., Jaeger G.Nanopositioning and nanomeasuring machine, multiscale measurement, optical and tactile sensors
| Document type | Article |
| Journal title / Source | tm – Technisches Messen 2015; 82(7–8): 359–366 |
| Peer-reviewed article | 1 |
| Volume | 82 |
| Issue | 7-8 |
| Page numbers / Article number | 359-366 |
| Publisher's name | De Gruyter |
| Publisher's address (city only) | Oldenbourg |
| Publication date | 2015 |
| DOI | 10.1515/teme-2015-0011 |
| Language | English |