Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
Brand U., XU M., Doering L., Langfahl-Klabes J., Behle H., Bütefisch S., Ahbe T., Mickan B., Peiner E., Völlmeke S., Frank T., Kiselev I., Drexel M., Hauptmannl M.cantilever microprobe, high-speed, contact resonance, tip wear, piezo-resistive, mechanical damping, tip-testing standard, cantilevers, micromechanical devices, surface topography measurement, shape measurement
| Document type | Datasets |
| Journal title / Source | Open Access Repository PTB |
| Publisher's name | Physikalisch-Technische Bundesanstalt (PTB) |
| DOI | 10.7795/720.20200515 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/720.20200515 |
| Language | English |