Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples
Pereira S.F., Kolenov D., Rafighdoost J.Silicon carbide, killer defects, microscopy, coherent Fourier scatterometry
| Document type | Article |
| Journal title / Source | IEEE Transactions on Semiconductor Manufacturing |
| Volume | 37 |
| Issue | 1 |
| Page numbers / Article number | 124-128 |
| Publisher's name | Institute of Electrical and Electronics Engineers (IEEE) |
| Publisher's address (city only) | Piscataway, NJ, United States |
| Publication date | 2024-2 |
| ISSN | 0894-6507, 1558-2345 |
| DOI | 10.1109/TSM.2023.3337720 |
| Web URL | https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10335636 |
| Language | English |