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On the Influence of Metal Chucks in Wideband On-Wafer Measurements

Phung G.N., Arz U.
Keywords:

calibration, coplanar waveguides, on-wafer, probes

Document type Proceedings
Journal title / Source 2022 98th ARFTG Microwave Measurement Conference
Publisher's name IEEE
Publication date 2022-8
Conference name 2022 98th ARFTG Microwave Measurement Conference
Conference date 17-01-2022 to 18-01-2022
Conference place Las Vegas
ISBN 978-1-6654-0662-8
Web URL https://oar.ptb.de/resources/show/10.7795/EMPIR.18SIB09.CA.20220915C
https://oar.ptb.de/files/download/632b08fd704400007c006391
Language English
Persistent Identifier 978-1-6654-0662-8

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