Development and characterisation of a low pressure transfer standard in the range 1 Pa to 10 kPa
Boineau F., Huret S., Otal P., Plimmer M.pressure, vacuum, transfer standard, resonant silicon gauge, mcapacitance diaphragm gauge
Document type | Article |
Journal title / Source | ACTA IMEKO |
Volume | 7 |
Issue | 1 |
Page numbers / Article number | 80 |
Publisher's name | IMEKO International Measurement Confederation |
Publication date | 2018-4 |
ISSN | 2221-870X |
DOI | 10.21014/acta_imeko.v7i1.496 |
Language | English |