PTB's enhanced stitching approach for the high-accuracy interferometric form error characterization of spheres
Bartl Guido, Krystek Michael, Nicolaus Arnoldsub-aperture stitching, form error, silicon sphere, roundness, sphere interferometer
Document type | Article |
Journal title / Source | Meas. Sci. Technol. |
Peer-reviewed article | 1 |
Volume | 25 |
Issue | - |
Page numbers / Article number | 064002 (8pp) |
Publisher's name | IOP |
Publisher's address (city only) | UK |
Publication date | 2014 |
ISSN | - |
DOI | 10.1088/0957-0233/25/6/064002 |
Web URL | - |
Language | English |