The gateway to Europe's
integrated metrology community.

On the optical constants of cobalt in the M-absorption edge region

Saadeh Qais, Laubis Christian, Babuschkin Anja, Mentzel Heiko, García Danilo Ocaña, Abdulhadi Yasser, Salami Zanyar, Buchholz Christian, Scholze Frank, Philipsen Vicky, Wu Meiyi, Thakare Devesh, Naujok Philipp, Soltwisch Victor
Keywords:

EUV-reflectometry, thin film metrology, optical constants, absorption edge

Document type Article
Journal title / Source Optik
Volume 273
Page numbers / Article number 170455
Publisher's name Elsevier BV
Publisher's address (city only) Amsterdam, NX, Netherlands
Publication date 2023-2
ISSN 0030-4026
DOI 10.1016/j.ijleo.2022.170455
Language English

Back to the list view

Information