Nested Sampling aided determination of tantalum optical constants in the EUV spectral range
Saadeh Q., Wiesner T., Stadelhoff C., Buchholz C., Scholze F., Thakare D., Philipsen V., Wu M., Naujok P., Soltwisch V.EUV reflectometry, Ooptical constants, thin film metrology, optimization, modelling
| Document type | Article |
| Journal title / Source | Applied Optics |
| Volume | 61 |
| Issue | 33 |
| Page numbers / Article number | 10032 |
| Publisher's name | Optica Publishing Group |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2022-11-17 |
| ISSN | 1559-128X, 2155-3165 |
| DOI | 10.1364/AO.472556 |
| Language | English |