Boron-Implanted Black Silicon Photodiode with Close-to-Ideal Responsivity from 200 to 1000 nm
Setälä O.E., Chen K., Pasanen T.P., Liu X., Radfar B., Vähänissi V., Savin H.silicon, nanowires
| Document type | Article |
| Journal title / Source | ACS Photonics |
| Volume | 10 |
| Issue | 6 |
| Page numbers / Article number | 1735-1741 |
| Publisher's name | American Chemical Society (ACS) |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2023-5-22 |
| ISSN | 2330-4022, 2330-4022 |
| DOI | 10.1021/acsphotonics.2c01984 |
| Web URL | https://pubs.acs.org/doi/full/10.1021/acsphotonics.2c01984 |
| Language | English |