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SI traceable determination of the spring constant of a soft cantilever using a nanonewton force facility based on electrostatic methods

Nesterov V., Belai O., Nies D., Buetefisch S., Muelelr M., Ahbe T., Neparty D., Popadic R., Wolff H.
Keywords:

Nanonewton force facility Spring constant Soft cantilever Contact potential SI-traceable determination

Document type Article
Journal title / Source Metrologia
Peer-reviewed article 1
Volume 53 (2016)
Issue 4
Page numbers / Article number 1031-1044
Publisher's name IOP Publishing Ltd.
Publisher's address (city only) Bristol
Publication date 2016-8-1
ISSN 0026-1394 (print) ; 1681-7575 (online)
DOI 10.1088/0026-1394/53/4/1031
Web URL http://www.ingentaconnect.com/content/iop/met/2016/00000053/00000004/art01031
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies