Fine details of structural deviations in reference samples for scatterometry
Siefke Thomas, Siaudinyté Lauryna, Jensen Søren Alkærsig, Rømer Astrid Tranum, Hansen Poul-Erikreference samples, scatterometry
| Document type | Article |
| Journal title / Source | Proceedings of the 19th IMEKO TC10 International Conference on Measurement for Diagnostics, Optimization and Control on Measurement in Testing, Inspection and Certification |
| Publisher's name | IMEKO |
| Publisher's address (city only) | Budapest, Hungary |
| Publication date | 2023 |
| DOI | 10.21014/tc10-2023.021 |
| Language | English |