Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces
Soltwisch V., Skroblin D., Nikolaev K., Siefke T., Andrle A., Kayser Y., Hönicke P., Gollwitzer C., Krumrey M., Fernández Herrero A.grazing emission X-ray fluorescence, nanostructures, line grating, scatterometry
| Document type | Article |
| Journal title / Source | Nanoscale |
| Volume | 14 |
| Issue | 41 |
| Page numbers / Article number | 15475-15483 |
| Publisher's name | Royal Society of Chemistry (RSC) |
| Publisher's address (city only) | Cambridge, United Kingdom |
| Publication date | 2022 |
| ISSN | 2040-3364, 2040-3372 |
| DOI | 10.1039/D2NR03046B |
| Language | English |