Multi-beam coherent Fourier scatterometry
Soman S, Horsten R C, Scholte T, Pereira S Fscatterometry, parallel, metrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 35 |
| Issue | 7 |
| Page numbers / Article number | 075905 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2024-4-18 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ad3b2a |
| Language | English |