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The Focus Variation Microscope: Linear Theory and Surface Tilt Sensitivity

NIKOLAEV N I, PETZING J, COUPLAND J M
Keywords:

Microscopy; Optical transfer functions; Focus Variation Microscopy

Document type Article
Journal title / Source Applied Optic
Peer-reviewed article 1
Volume 55
Issue 13
Page numbers / Article number 3555-3565
Publisher's name The Optical society of America
Publisher's address (city only) Washington, USA
Publication date 2016-5-1
ISSN 1559-128X (print); 2155-3165 (online)
DOI 10.1364/AO.55.003555
Web URL https://www.osapublishing.org/ao/abstract.cfm?uri=ao-55-13-3555
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2012 Metrology for Industry (II)