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Traceable Quasi-dynamic Stroboscopic Scanning White Light Interferometry

Heikkinen V, Nolvi A, Paulin T, Seppä J, Kassamakov I, Lassila A, Hæggström E
Keywords:

SSWL (Stroboscopic Scanning White Light Interferometry), Metrology Transfer standards

Document type Proceedings
Journal title / Source Fringe 2013
Peer-reviewed article 1
Page numbers / Article number 491 - 496
Publisher's name Springer Berlin Heidelberg
Publisher's address (city only) Berlin
Publication date 2014-1-1
Conference name 7th International Workshop on Advanced Optical Imaging and Metrology
Conference date 01-01-2014
Conference place Nurtingen, Germany
DOI 10.1007/978-3-642-36359-7_86
ISBN 9783642363597
Web URL http://link.springer.com/book/10.1007/978-3-642-36359-7
Language English

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Information

Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies