Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine
Vorbringer-Dorozhovets N, Goj B, Machleidt T, Franke K-H, Hoffmann M, Manske Enanopositioning and nanomeasuring machine, metrological scanning probe microscope, AFM, electromagnetic changer for SPM probes, fiducial marks
| Document type | Article |
| Journal title / Source | Meas. Sci. Technol. |
| Volume | 25 |
| Issue | 044006 |
| Publication date | 2014 |
| DOI | 10.1088/0957-0233/25/4/044006 |