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Switchable optics based on guided mode resonance in lithographically patterned vanadium dioxide with integrated heating layer

Walther M., Siefke T., Gerold K., Zeitner U. D.
Keywords:

Vanadium dioxide, Guided mode resonance, Phase change material, Lithography, Switching, VO2, Spectroscopy, Reflectivity, Reactive ion beam deposition, Micro optics

Document type Article
Journal title / Source Journal of the European Optical Society-Rapid Publications
Volume 19
Issue 1
Page numbers / Article number 21
Publisher's name EDP Sciences
Publisher's address (city only) Les Ulis cedex A, France
Publication date 2023
ISSN 1990-2573
DOI 10.1051/jeos/2023019
Language English

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