Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements
XU M., Li Z., Fahrbach M., Peiner E., Brand U.roughness measurement, piezoresistive microprobe, high-speed surface measurement
| Document type | Article |
| Journal title / Source | Sensors |
| Volume | 21 |
| Issue | 5 |
| Page numbers / Article number | 1557 |
| Publisher's name | MDPI AG |
| Publication date | 2021-2-24 |
| ISSN | 1424-8220 |
| DOI | 10.3390/s21051557 |
| Language | English |