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Self-calibration of in situ monoscopic deflectometric measurement in precision optical manufacturing

XU M., XU X., Zhang X., NIU Z., Wang W., ZHU Y.
Keywords:

deflectometry; optical manufacturing; metrology; self-calibration;

Document type Article
Journal title / Source Optics Express
Volume 27
Issue 5
Page numbers / Article number 7523-7536
Publisher's name The Optical Society
Publication date 2019
ISSN 1094-4087
DOI 10.1364/OE.27.007523
Web URL https://www.osapublishing.org/oe/abstract.cfm?uri=oe-27-5-7523
Language English

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Information

Name of Call / Funding Programme
EMPIR 2015: SI Broader Scope