Multiple fibre interferometry setup for probe sample interaction measurements in atomic force microscopy
Klapetek P., Yacoot A., Hortvík V., Duchoň V., Dongmo H., Rerucha S., Valtr M., Nečas D.atomic force microscopy, Fibre interferometry, probe sample interaction, nanometrology
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Publisher's name | IOP Publishing |
| Publication date | 2020-4 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ab85d8 |
| Language | English |