The gateway to Europe's
integrated metrology community.

On the Importance of Calibration Standards Definitions for On-Wafer Measurements up to 110 GHz

Zinal S., Arz U., Doerner R. , Probst T.
Keywords:

Calibration, Substrates, Standards, Probes, Aluminum oxide, Frequency measurement,

Document type Proceedings
Journal title / Source 2018 91st ARFTG Microwave Measurement Conference (ARFTG)
Publisher's name IEEE
Publication date 2018-6
Conference name 2018 91st ARFTG Microwave Measurement Conference (ARFTG)
Conference date 15-06-2018 to 15-06-2018
Conference place Philadelphia, PA, USA
DOI 10.7795/EMPIR.14IND02.CA.20190403C
Web URL https://doi.org/10.1109/ARFTG.2018.8423829
Language English

Back to the list view

Information

Name of Call / Funding Programme
EMPIR 2014: Industry